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| OHT Reticle SMIF Pod / RSP150

 
OHT Reticle SMIF Pod / RSP150
Products Specification
● Product name:OHT Mask Automated Transfer Box
● Part number:RSP-CKPP-O
● Dimension:229.8mm (L) x 227.3mm (W) x 91.8mm (H)
● Weight:1340g
● Capacity:1 PCS
● Mask size:6025 Mask(6 inch)
● Material:PEEK
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Products Description

OHT Mask Automated Transfer Box / OHT Reticle SMIF Pod / RSP150
High cleanliness prevents airborne contamination, ensuring safe transportation and storage of 6-inch masks between process stations. Applicable for automated exposure machines.

Equipped with a clean air inflation feature, it can control the temperature and humidity within the light shield transfer box, creating a microenvironment. It also features a Top Flange design and supports rapid transfer through AMHS's OHT.

It can be paired with equipment such as exposure machines, light shield inspection machines, and POD automated stockers, among other related tools used in the light shield manufacturing and transfer processes. Brands like ASML, Nikon, KLA, etc., which comply with SEMI SMIF specifications, offer compatible models for integration.

OHT Mask Automated Transfer Box / OHT Reticle SMIF Pod / RSP150
High cleanliness prevents airborne contamination, ensuring safe transportation and storage of 6-inch masks between process stations. Applicable for automated exposure machines.
Customized
Able to install RFID   Description of Mount Barcode   Run Cad
Reticle SMIF Pod(RSP 150)
Able to install RFID
  Reticle SMIF Pod(RSP 150)
Description of Mount Barcode
  Reticle SMIF Pod(RSP 150)
Run Cad
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