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| ● Product name：8" PEI Wafer Cassette(Slim Type) |
| ● Part number：PE-C200-T |
| ● Dimension：233.6 (L)x 203.3 (W)x 217.85 (H)mm |
| ● Weight：932g |
| ● Capacity：13 PCS |
● Apply for round wafer：8 inch (Ø200mm)
Wafer |
| ● Material：PEI ESD |
| ● Slot Pitch：12.7mm |
| ● Degree of temperature resistance：120°C |
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For general process. Wafer carrier and used to transfer between station and station. Provide suitable characteristics of the polymer composite material according to customer’s needs. It can collocation with airtight storage box to protect wafer.
● ESD material are provided.
● Use to transfer inside factory
● Able to go with airtight Storage Box to protect wafer |
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| Material |
Degree of temperature resistance |
Property |
Application |
| PFA Cassette |
200~220℃ |
Strong acid, strong hydrofluoric acid, strong base resistant |
For acid& base process |
| PP Cassette |
40~60℃ |
Pros: Light weight, able to welding
Cons: Distort easily |
For general transfer process |
| PEEK Cassette |
120℃ |
High hardness, not easy to distort, high temperature resistant |
| PC Cassette |
80~100℃ |
Light weight, able to welding |
| PEI Cassette |
130~150℃ |
Wear resistant, anti-static |
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| ● Able to do laser engraving、Able to install RFID. Keep the track of carrier and material. |
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| Able to install RFID |
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Cassette Able to do laser engraving |
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