AOMS(Auto-Optical Measurement System)
The AOMS(Auto-Optical Measurement System) is a dedicated wafer carrier measurement system designed tomanage dimensional accuracy. It provides all dimensional measurements required for wafer carrier fabrication, including control of deformation due to again of wafers and of wafer carriers.
(1)Detects hard-to-see edges using Chung King’s unique imageprocessing technologies.
(2)Incorporates high definition camera that provides quick non-contact focusing, even on the edge of the peripheries of the wafer, to measure SEMI-standard dimensions with excellent accuracy and at high speed.
(3)Designed for 300mm, 200mm, 150mm , 125mm , 100mm, 75mm, 50mm wafer carriers. |
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